Sputtering system, 6(3) Target assemblies: Conmag IIStation 1: Heated etch with AE RF-10 power suppliesStation 2: Heater table with conmag IIStation 3: Heater table with conmag IIStation 4: Heater table with conmag II(4) Temperature controllers: Eurotherm 818Controller: Fluke 1722A modified with flash drive and floppy driveMultimeter: HP 3438AFerrofluidic transfer plate feedthru grade(3) Ferrofluidic shutter feedtrhu upgradesIon gauge controller: Varian 880Remote power supply panelDigital readoutEtch matching unit controller with digital readout metersRF RWD and REFL remote meter panelCryo pump: CTI CT-8 with SC compressorDry scroll mechanical pump: noPower supplies:Target 1: Inner 2.5kW, outer 12kWTarget 2: Inner 2.5kW, outer 12kWTarget 3: Inner 2.5kW, outer 12kW Currently warehoused1989 vintage.